Conventional Mirror System
The conventional mirror system has up to five motorised degrees of freedom (mirror height, pitch, yaw, horizontal translation, and roll.) Bellows are required at each end of the system to accommodate all vessel and mirror in-plane motions. Roll adjustment is implemented with motion relative to the vessel to prevent twisting of the bellows.
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Specifications
| Vacuum performance | <5 x 10-10mbar |
| Helium leak rate | <1 x 10-9mbar l/sec |
| Maximum bakeout temperature | 150°C |
| Mirror length | 300 to 1700mm |
| Vertical drive resolution | 0.1μm |
| Horizontal drive resolution | <5μm |
| Range of linear motion in all directions | Up to 40mm |
| Number of degrees of freedom for mirror positioning system | Up to 5 motorised |
| Vertical actuator type | Manual or stepper motor with gearbox |
| Horizontal actuator type | Manual or stepper motor with gearbox |
| Limit switches | Fitted to all motorised motions |
| Number of degrees of freedom for manual stand adjustments | 6 |
Options
- Mirror Cooling
- Mirror Bender (U-bender)
- Mirror Bender (4-cylinder bender)
- Integrated cooled mask (grazing incidence)
- Integrated cooled mask (normal incidence)
- Control system
- Vacuum pump
- Fiducial mounts