High Heatload Cooled Masks
‘HHL’ Range high heat load masks have precision cut bodies made from Glidcop® which are explosion bonded to stainless steel flanges. They can withstand total beam power of up to 5000W and local power densities of up to 500W/mm2. Cooling channels can be fitted with special coil inserts to enhance the heat transfer by a factor of four.
Specifications
Vacuum performance | ≤5×10-10mbar |
Helium leak rate | ≤1×10-9mbar l/sec |
Flange sizes | To suit |
Body material | Glidcop® |
Maximum power | <5000W |
Maximum power density | <500W/mm² |
Construction | Explosion bonding |
Orientation of cooling channels | Longitudinal |